Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
3 Aug 2023 | SERC | Institute of Microelectronics | Alignment through thick Si layer for high resolution patterning on bonded wafers with tight overlay margin using immersion lithography | Arvind Sundaram, Chin Khang Tew, Guo Wei Tan, Yuan-Hsing Fu, Hongyu Li, Nandini Venkataraman, Bhesetti Chandra Rao, Navab Singh | 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) |
28 Aug 2019 | SERC | Institute of Microelectronics | CMOS-compatible all-Si metasurface polarizing bandpass filters on 12-inch wafers | Zhengji Xu, Yuan Dong, Chih-Kuo Tseng, Ting Hu, Jinchao Tong, Qize Zhong, Nanxi Li, Larry Sim, Keng Heng Lai, Ying Lin, Dongdong Li, Yu Li, Bliznetsov Vladimir, Yuan-Hsing Fu, Shiyang Zhu, Qunying Lin, Dao Hua Zhang, Yuandong Gu, Navab Singh, Dim-Lee Kwong | Optics Express |