Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
16 Sep 2015 | SERC | Data Storage Institute | Exploring High Refractive Index Silicon-Rich Nitride Films by Low-Temperature Inductively Coupled Plasma Chemical Vapor Deposition and Applications for Integrated Waveguides | Yeow-Teck Toh, Kim-Peng Lim, Yi Yang, Dawn T. H. Tan, Doris K. T. Ng, Qian Wang, Ting Wang, Siu-Kit Ng | ACS Applied Materials & Interfaces |