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Publication date Communities Collections Article title Author(s) Journal/Conference
1 Apr 2018 SERC Institute of Microelectronics Wafer-Level Vacuum-Packaged High Performance AlN-on-SOI Piezoelectric Resonator for Sub-100 MHz Oscillator Applications Guoqiang Wu, Jinghui Xu, Xiaolin Zhang, Nan Wang, Danlei Yan, Jayce Lay Keng Lim, Yao Zhu, Wei Li, Yuandong Gu IEEE Transactions on Industrial Electronics
21 Feb 2017 SERC Institute of Microelectronics Effectiveness of oxide trench array as a passive temperature compensation structure in AlN-on-silicon micromechanical resonators Andrew Randles, Pushpapraj Singh, Qingyun Xie, Nan Wang, Chengliang Sun, Xiaolin Zhang, Yuandong Gu Applied Physics Letters
19 Jul 2016 SERC Institute of Microelectronics AlN-on-SOI platform-based micro-machined hydrophone Jinghui Xu, Xiaolin Zhang, Sanchitha Fernando, Kevin Tshunchuan Chai, Alex Yuandong Gu Applied Physics Letters
20 May 2016 SERC Institute of Microelectronics Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform Nan Wang, Jinghui Xu, Xiaolin Zhang, Guoqiang Wu, Yao Zhu, Wei Li, Alex Yuandong Gu Journal of Micromechanics and Microengineering