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Publication date Communities Collections Article title Author(s) Journal/Conference
23 Jul 2018 SERC Institute of Microelectronics Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer Ting Hu, Chih-Kuo Tseng, Yuan Hsing Fu, Zhengji Xu, Yuan Dong, Shijie Wang, Keng Heng Lai, Vladimir Bliznetsov, Shiyang Zu, Qunying Lin, Yuandong Gu Optics Express
3 Oct 2017 SERC Institute of Microelectronics MEMS Industry-Worth Etching to Fabricate Tapered Structures in SiO2 Vladimir Bliznetsov, Bin Li, Jae Wung Lee, Huamao Lin Journal of Micoelectromechanical Systems
22 Jul 2015 SERC Institute of Microelectronics Deep SiO2 etching with Al and AlN masks for MEMS devices Vladimir Bliznetsov, Hua Mao Lin, Yue Jia Zhang, David Johnson Journal of Micromechanics and Microengineering
27 Sep 2013 SERC Institute of Microelectronics Improving aluminum nitride plasma etch process for MEMS applications Vladimir Bliznetsov, Badrul Hisam Bin Johari, Mohamed Tahar Chentir, Wei Hong Li, Lai Yin Wong, Srinivas Merugu, Xiao Lin Zhang, Navab Singh Journal of Micromechanics and Microengineering