Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
19 Jul 2016 | SERC | Institute of Microelectronics | AlN-on-SOI platform-based micro-machined hydrophone | Jinghui Xu, Xiaolin Zhang, Sanchitha Fernando, Kevin Tshunchuan Chai, Alex Yuandong Gu | Applied Physics Letters |
28 Feb 2014 | SERC | Institute of Microelectronics | Integration of AlN with molybdenum electrodes and sacrificial amorphous silicon release using XeF2 | Jaibir Sharma, Sanchitha Fernando, Wee Ming Tan | Journal of Micromechanics and Microengineering |
1 Sep 2013 | SERC | Institute of Microelectronics | Low-Loss Broadband Package Platform With Surface Passivation and TSV for Wafer-Level Packaging of RF-MEMS Devices | Jaibir Sharma, Cheng Jin, Ying Ying Lim, Justin See Toh, Sanchitha Fernando, Bangtao Chen, Vasarla Nagendra Sekhar | IEEE Transactions on Components, Packaging and Manufacturing Technology |