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31 Aug 2024 SERC Institute of Materials Research & Engineering Influence of process parameters on properties of Super Invar alloy fabricated by laser powder bed fusion for semiconductor equipment (Pending publish) Renjie Zhao, Yakai Zhao, Meng Qin, Yubo Jia, Kai Feng, Zhuguo Li, Upadrasta Ramamurty, Renbiao Xie Additive Manufacturing