| Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
|---|---|---|---|---|---|
| 27 Sep 2013 | SERC | Institute of Microelectronics | Improving aluminum nitride plasma etch process for MEMS applications | Vladimir Bliznetsov, Badrul Hisam Bin Johari, Mohamed Tahar Chentir, Wei Hong Li, Lai Yin Wong, Srinivas Merugu, Xiao Lin Zhang, Navab Singh | Journal of Micromechanics and Microengineering |