Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
1 Oct 2013 | SERC | Institute of Microelectronics | MEMS Electrostatic Double T-Shaped Spring Mechanism for Circumferential Scanning | Xiaojing Mu, Guangya Zhou, Hongbin Yu, Julius M.-L. Tsai, Dennis W. K. Neo, Anantharajan Senthil Kumar, Fook S. Chau | Journal of Microelectromechanical Systems |