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18 Mar 2024
SERC
Institute of Microelectronics
Optimization of the CMP process for direct wafer-to-wafer oxide bonding
Hong-Miao Ji,
Hemanth Kumar Cheemalamarri,
Ting-Ta Chi,
Hui-ting Lim Serene,
Wei-Jie Teo Dickson,
Siang-Kiat Neo Alfred,
Hong-Yu Li,
Gim-Guan Chen Jon,
Nandini Venkataraman,
Wen Lee
2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)
18 Mar 2024
SERC
Institute of Microelectronics
Study of Cu Pad Expansion with Surrounding Dielectrics for Hybrid Bonding
Hemanth Kumar Cheemalamarri,
Ji Lir,
Wen Lee,
Vempati Srinivasa Rao,
Navab Singh
2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)
3 Aug 2023
SERC
Institute of Microelectronics
CMOS-Compatible Fine Pitch Al-Al Bonding
Hemanth Kumar Cheemalamarri,
Binni Varghese,
Sharma Jaibir,
Li Hongyu,
Chandra Rao S S,
Navab Singh,
Vempati Srinivasa Rao,
King-Jien Chui
2023 IEEE 73rd Electronic Components and Technology Conference (ECTC)
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