Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
7 May 2024 | SERC | Institute of Microelectronics | Monolithic Integration of ScAlN MEMS Filter on RFSOI Using ALD Al2O3 as VHF Barrier (Pending publish) | Xinghua Wang, Ying Zhang, Chen Liu, Eugene Yi Zhun Woo, Wenjia Yang, Nan Wang, Yao Zhu, Qingxin Zhang | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
7 May 2024 | SERC | Institute of Microelectronics | Nonlinear Performance of Monolithically Integrated Scaln-Based Ghz Acoustic Filters With Rfsoi Switches (Pending publish) | Chen Liu, Ying Zhang, Xinghua Wang, Wenjia Yang, Eugene Yi Zhun Woo, Danlei Yan, Raja M. Kumarasamy, Nan Wang, Yao Zhu | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
7 Nov 2023 | SERC | Institute of Microelectronics | A Sc<sub>0.2</sub>Al<sub>0.8</sub>N-based 14 GHz Film Bulk Acoustic Resonator with over 8% Coupling Coefficient and over 400 Quality factor for Ku-band applications (Pending publish) | Chen Liu, Xinghua Wang, Wenjia Yang, Ying Zhang, Eugene Yi Zhun Woo, Yao Zhu | 2023 IEEE International Ultrasonics Symposium (IUS) |
7 Nov 2023 | SERC | Institute of Microelectronics | De-embedding of Contact Pads Parasitics in RFMEMS resonators for 5G Applications (Pending publish) | Wenjia Yang, Chen Liu, Ying Zhang, Bhattacharya Shashwat, Xinghua Wang, Eugene Yi Zhun Woo, Yao Zhu | 2023 IEEE International Ultrasonics Symposium (IUS) |