Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
---|---|---|---|---|---|
3 Aug 2023 | SERC | Institute of Microelectronics | Doping-selective etching of silicon for wafer thinning in the fabrication of backside-illuminated stacked CMOS image sensors | Nandini Venkataraman, Benedikt Risse, Gregorio Decierdo, Navab Singh, Darshini Senthilkumar, Deepthi Kandasamy, Eng Huat Toh, Louis Lim | 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) |