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Publication date Communities Collections Article title Author(s) Journal/Conference
18 Mar 2024 SERC Institute of Microelectronics Patterning on reflective (Al) surface using auto alignment in immersion lithography to achieve tight overlay for reconfigurable metasurface devices (Pending publish) Arvind Sundaram, Prakash Pitchappa, Gu Zhonghua, Jae Ok Yoo, Navab Singh 2023 IEEE 25th Electronics Packaging Technology Conference (EPTC)
3 Aug 2023 SERC Institute of Microelectronics A Precise Wafer Thinning Integration Process for nano-TSV Formation Ya-Ching Tseng, Simon Chun Kiat Goh, Senthilkumar Darshini, Nandini Venkataraman, Arvind Sundaram, Tew Chin Khang, Yoo Jae Ok, King-Jien Chui 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC)
3 Aug 2023 SERC Institute of Microelectronics Laser integration on a photonic integrated circuit with high alignment accuracy for data transmission Ting Ta Chi, Zhenyu Li, Nanxi Li, Hong Cai, Y M Tobing Landobasa, Haitao Yu, Senthilkumar Darshini, Jae Ok Yoo, Arvind Sundaram, B.S.S. Chandra Rao, Lennon Y. T. Lee, Wen Lee 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC)
3 Aug 2023 SERC Institute of Microelectronics Alignment through thick Si layer for high resolution patterning on bonded wafers with tight overlay margin using immersion lithography Arvind Sundaram, Chin Khang Tew, Guo Wei Tan, Yuan-Hsing Fu, Hongyu Li, Nandini Venkataraman, Bhesetti Chandra Rao, Navab Singh 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC)
15 Mar 2023 SERC Institute of Microelectronics Model-based optical proximity correction for immersion lithography-based flat optics platform Narak Choi, Keng Heng Lai, Arvind Sundaram, Navab Singh, Yuan Hsing Fu, Lennon Yao Ting Lee High Contrast Metastructures XII