Publication date | Communities | Collections | Article title | Author(s) | Journal/Conference |
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21 Feb 2017 | SERC | Institute of Microelectronics | Effectiveness of oxide trench array as a passive temperature compensation structure in AlN-on-silicon micromechanical resonators | Andrew Randles, Pushpapraj Singh, Qingyun Xie, Nan Wang, Chengliang Sun, Xiaolin Zhang, Yuandong Gu | Applied Physics Letters |