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19 Jul 2016
SERC
Institute of Microelectronics
AlN-on-SOI platform-based micro-machined hydrophone
Jinghui Xu,
Xiaolin Zhang,
Sanchitha Fernando,
Kevin Tshunchuan Chai,
Alex Yuandong Gu
Applied Physics Letters
15 Jul 2016
SERC
Institute of Microelectronics
An ultrahigh-accuracy Miniature Dew Point Sensor based on an Integrated Photonics Platform
Jifang Tao,
Yu Luo,
Li Wang,
Hong Cai,
Tao Sun,
Junfeng Song,
Hui Liu,
Alex Yuandong Gu
Scientific Reports
20 May 2016
SERC
Institute of Microelectronics
Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform
Nan Wang,
Jinghui Xu,
Xiaolin Zhang,
Guoqiang Wu,
Yao Zhu,
Wei Li,
Alex Yuandong Gu
Journal of Micromechanics and Microengineering
26 Jun 2015
SERC
Institute of Microelectronics
Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators
Alex Yuandong Gu,
Bo Woon Soon,
Yao Zhu,
Chengliang Sun,
Nan Wang,
Samuel Pei Hao Loke,
Xiaojing Mu,
Jifang Tao
Applied Physics Letters
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