Khaidarov, E., Eschimese, D., Lai, K. H., Huang, A., Fu, Y. H., Lin, Q., Paniagua-Dominguez, R., & Kuznetsov, A. I. (2022). Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography. Scientific Reports, 12(1). https://doi.org/10.1038/s41598-022-18259-9
Abstract:
AbstractNanostructures exhibiting optical resonances (so-called nanoantennas) have strong potential for applications in color printing and filtering with sub-wavelength resolution. While small scale demonstrations of these systems are interesting as a proof-of-concept, their large scale and volume fabrication requires deeper analysis and further development for industrial adoption. Here, we evaluate the color quality produced by large size nanoantenna arrays fabricated on a 12-in. wafer using deep UV immersion photolithography and dry etching processes. The color reproduction and quality are analyzed in context of the CIE color diagram, showing that a vivid and vibrant color palette, almost fully covering the sRGB color space, can be obtained with this mass-manufacturing-ready fabrication process. The obtained results, thus, provide a solid foundation for the potential industrial adoption of this emerging technology and expose the limits and challenges of the process.
License type:
Attribution 4.0 International (CC BY 4.0)
Funding Info:
This research / project is supported by the A*STAR - RIE2020 AME Programmatic Funding
Grant Reference no. : A18A7b0058
This research / project is supported by the National Research Foundation - Investigatorship Award
Grant Reference no. : NRF-NRFI2017-01