Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs

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Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs
Title:
Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs
Journal Title:
IEEE Sensors Journal
Keywords:
Publication Date:
15 August 2023
Citation:
Sarafianou, M., Choong, D. S. W., Chen, D. S.-H., Goh, D. J., Yao, Z., Sharma, J., Merugu, S., Ng, E. J., & Lee, J. E.-Y. (2023). Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs. IEEE Sensors Journal, 23(20), 24254–24263. https://doi.org/10.1109/jsen.2023.3302354
Abstract:
This work demonstrates the imaging capabilities of a silicon-on-nothing (SON) ScAlN piezoelectric micromachined ultrasonic transducer (pMUT) array by a method of transmit beamforming followed by suitable signal postprocessing for 3-D image reconstruction. A 2.7-MHz pMUT array with 15% scandium-doped aluminum nitride (ScAlN) as the piezo thin film was implemented for this demonstration. A total of 163×3 -mm dies consisting of 34×37 pMUT elements per die and operated as dual channels were arranged in an eight-column × two-row array configuration, resulting in a 32-channel experimental system with a 24×6 -mm coverage. In this work, experimental testing using single and multiple 6-mm-diameter reflectors at a different spacing from each other and a distance of 2.5 cm from the array was performed to validate the 3-D imaging capabilities of the developed 2-D SON ScAlN pMUT array with an attained lateral resolution of 5 mm.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - Piezo Specialty Lab-in-a-Fab
Grant Reference no. : I1901E0050

This research / project is supported by the A*STAR - Nanosystems at the Edge
Grant Reference no. : A18A4b0055
Description:
© 2023 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISSN:
1558-1748
2379-9153
1530-437X
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