Samanta, S., Liu, C., Wang, Z., Chen, L., Zhu, Y., Li, M., Varghese, B., Lin, H., & Lee, H. K. (2023, July 23). First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film. 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF). https://doi.org/10.1109/isaf53668.2023.10265482
Abstract:
In this paper, the First-Order Reversal Curve (FORC) technique is employed to analyze the impact of scandium-doped aluminum nitride (Al 0.7 Sc 0.3 N) ferroelectric film thickness in sub-50 nm regime on coercive field and built-in-bias field distributions in Mo/Al 0.7 Sc 0.3 N/Mo metal-ferroelectric-metal (MFM) capacitors. From the FORC distribution, we find that switching density becomes widened and flattened in thinner Al 0.7 Sc 0.3 N films. The coercive field increases with scaling down the Al 0.7 Sc 0.3 N film thickness. This study will be helpful to understand the effect of Al 0.7 Sc 0.3 N film thickness variation on ferroelectric switching for future non-volatile memory (NVM) applications.
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Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing (WP06)
Grant Reference no. : A20G9b0135