First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film

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First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film
Title:
First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film
Journal Title:
2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
Keywords:
Publication Date:
29 September 2023
Citation:
Samanta, S., Liu, C., Wang, Z., Chen, L., Zhu, Y., Li, M., Varghese, B., Lin, H., & Lee, H. K. (2023, July 23). First Order Reversal Curves for the Evaluation of Thickness Dependent Ferroelectric Switching in Al0.7Sc0.3N Film. 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF). https://doi.org/10.1109/isaf53668.2023.10265482
Abstract:
In this paper, the First-Order Reversal Curve (FORC) technique is employed to analyze the impact of scandium-doped aluminum nitride (Al 0.7 Sc 0.3 N) ferroelectric film thickness in sub-50 nm regime on coercive field and built-in-bias field distributions in Mo/Al 0.7 Sc 0.3 N/Mo metal-ferroelectric-metal (MFM) capacitors. From the FORC distribution, we find that switching density becomes widened and flattened in thinner Al 0.7 Sc 0.3 N films. The coercive field increases with scaling down the Al 0.7 Sc 0.3 N film thickness. This study will be helpful to understand the effect of Al 0.7 Sc 0.3 N film thickness variation on ferroelectric switching for future non-volatile memory (NVM) applications.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing (WP06)
Grant Reference no. : A20G9b0135
Description:
© 2023 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISSN:
2375-0448
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