Piezoelectric MEMS for Frequency Control and Sensing

Piezoelectric MEMS for Frequency Control and Sensing

2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)

10.1109/EFTF/IFCS57587.2023.10272160

http://dx.doi.org/10.1109/eftf/ifcs57587.2023.10272160

Yao Zhu, Bhattacharya Shashwat, Wenjia Yang, Li Chen, Ying Zhang, Chen Liu

09 October 2023

Zhu, Y., Shashwat, B., Yang, W., Chen, L., Zhang, Y., & Liu, C. (2023, May 15). Piezoelectric MEMS for Frequency Control and Sensing. 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS). https://doi.org/10.1109/eftf/ifcs57587.2023.10272160

This paper reviews key piezoelectric MEMS works for the applications of RF signal processing and sensing. The material, device design, and performance of AlN and Sc-doped AlN piezoelectric MEMS devices are discussed. Different process platforms and their applications in frequency control and sensing applications are also presented. Finally, the trends in piezoelectric MEMS research are summarized and future work is recommended.

Publisher Copyright

This research / project is supported by the A*STAR - Ferroelectric Aluminum Scandium Nitride (Al1-xScxN) Thin Films and Devices for mm-Wave and Edge Computing (WP05)
Grant Reference no. : A20G9b0135

This research / project is supported by the A*STAR - Nanosystems at the Edge (WP03)
Grant Reference no. : A18A4b0055

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2327-1949

Institute of Microelectronics