Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer

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Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer
Title:
Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer
Journal Title:
CLEO 2023
Keywords:
Publication Date:
27 July 2023
Citation:
Li, N., Lim, L. W., Xue, J., Ho, C. P., Zhu, S., Fu, Y. H., & Lee, L. Y. T. (2023). Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer. CLEO 2023. https://doi.org/10.1364/cleo_at.2023.am3m.5
Abstract:
A nanophotonic phased array is demonstrated on aluminum nitride photonics platform developed on an 8-inch silicon wafer. A beam spot at 1550 nm is clearly observed. Total power loss of 11.4 dB is also reported.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - Project Lightning
Grant Reference no. : C220415015

This research / project is supported by the A*STAR - Novel PAT Sensors
Grant Reference no. : A19B3a0008
Description:
© 2023 Optica Publishing Group. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.
ISBN:
978-1-957171-25-8
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