Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer

Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer

CLEO 2023

10.1364/CLEO_AT.2023.AM3M.5

http://dx.doi.org/10.1364/cleo_at.2023.am3m.5

Nanxi Li, Leh Woon Lim, Jin Xue, Chong Pei Ho, Shiyang Zhu, Yuan Hsing Fu, Lennon Y. T. Lee

27 July 2023

Li, N., Lim, L. W., Xue, J., Ho, C. P., Zhu, S., Fu, Y. H., & Lee, L. Y. T. (2023). Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer. CLEO 2023. https://doi.org/10.1364/cleo_at.2023.am3m.5

A nanophotonic phased array is demonstrated on aluminum nitride photonics platform developed on an 8-inch silicon wafer. A beam spot at 1550 nm is clearly observed. Total power loss of 11.4 dB is also reported.

Publisher Copyright

This research / project is supported by the A*STAR - Project Lightning
Grant Reference no. : C220415015

This research / project is supported by the A*STAR - Novel PAT Sensors
Grant Reference no. : A19B3a0008

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https://oar.a-star.edu.sg/communities-collections/articles/20260

978-1-957171-25-8

Institute of Microelectronics