Li, N., Lim, L. W., Xue, J., Ho, C. P., Zhu, S., Fu, Y. H., & Lee, L. Y. T. (2023). Aluminum Nitride Nanophotonic Phased Array on an 8-inch Silicon Wafer. CLEO 2023. https://doi.org/10.1364/cleo_at.2023.am3m.5
Abstract:
A nanophotonic phased array is demonstrated on aluminum nitride photonics platform developed on an 8-inch silicon wafer. A beam spot at 1550 nm is clearly observed. Total power loss of 11.4 dB is also reported.
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Funding Info:
This research / project is supported by the A*STAR - Project Lightning
Grant Reference no. : C220415015
This research / project is supported by the A*STAR - Novel PAT Sensors
Grant Reference no. : A19B3a0008