Citation:
Ng, D. K. T., Chen, W., Wang, H., Gu, Z., Md Husni, M. H. K., Koh, I. J. W. Y., Xu, L., Wee, K. P. X., Ho, C. P., Goh, J. S., & Zhang, Q. (2024). Hydrogen sensor (400 ppm - 1%) based on 20% ScAlN pyroelectric detector for a sustainable society. In L. P. Sadwick & T. Yang (Eds.), Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII. SPIE. https://doi.org/10.1117/12.3021874