Citation:
Li, N., Fong, A. W. K., Wang, H., Lim, L. W., Tobing, L. Y. M., Chua, Y. D., Xu, L., Chen, W., Zhang, Q., Cai, H., Wang, Q. J., & Lee, L. Y. T. (2023). An integrated MEMS thermal emitter with piezoelectric actuation. In W. Piyawattanametha, Y.-H. Park, & H. Zappe (Eds.), MOEMS and Miniaturized Systems XXII. SPIE. https://doi.org/10.1117/12.2649536