Final report on supplementary comparison on step heights standards (APMP.L-S7)

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Final report on supplementary comparison on step heights standards (APMP.L-S7)
Title:
Final report on supplementary comparison on step heights standards (APMP.L-S7)
Journal Title:
Metrologia
Publication Date:
10 August 2021
Citation:
Sharma, R., Moona, G., Tonmueanwai, A., Buajarern, J., Shihua, W., Matus, M., Doi, T., & Sugawara, K. (2021). Final report on supplementary comparison on step heights standards (APMP.L-S7). Metrologia, 58(1A), 04003. https://doi.org/10.1088/0026-1394/58/1a/04003
Abstract:
This intercomparison is carried out for step height standards with nominal step sizes 8 nm, 18 nm, 88 nm and 10 µm using non-contact measurement methods, with four participating NMIs. Measurement observation from the pilot laboratory exhibit significant stability of step height standards. For each step height standard, the supplementary comparison reference value (SCRV) is determined using weighted mean, followed by calculation of En values for outlier identification. Further the outliers were excluded based upon the Birge Ratio consistency test. Measurement results from all the participating NIMs have been compiled in this report. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database https://www.bipm.org/kcdb/. The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).
License type:
Publisher Copyright
Funding Info:
There was no specific funding for the research done
Description:
ISSN:
0026-1394
1681-7575