Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb

Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb

Conference on Lasers and Electro-Optics

10.1364/CLEO_SI.2021.STu2A.6

http://dx.doi.org/10.1364/cleo_si.2021.stu2a.6

Hao Liu, Yoon-Soo Jang, Jinghui Yang, Mingbin Yu, Dim-Lee Kwong, Chee Wei Wong

17 August 2021

Liu, H., Jang, Y.-S., Yang, J., Yu, M., Kwong, D.-L., & Wong, C. W. (2021). Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb. Conference on Lasers and Electro-Optics. https://doi.org/10.1364/cleo_si.2021.stu2a.6

We present ultra-precision distance measurement based on spectral interferometer via single soliton microcomb generated in Si3N4 microresonator. We demonstrate 3-nm repeatability over a 23-mm non-ambiguity range via homodyne interferometry, over 1000s long-term stability.

Publisher Copyright

This research is supported by core funding from: Institute of Microelectronics
Grant Reference no. : NIL

© 2021 Optica Publishing Group. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited

https://oar.a-star.edu.sg/communities-collections/articles/18797

978-1-943580-91-0

Institute of Microelectronics