Liu, H., Jang, Y.-S., Yang, J., Yu, M., Kwong, D.-L., & Wong, C. W. (2021). Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb. Conference on Lasers and Electro-Optics. https://doi.org/10.1364/cleo_si.2021.stu2a.6
We present ultra-precision distance measurement based on spectral interferometer via single soliton microcomb generated in Si3N4 microresonator. We demonstrate 3-nm repeatability over a 23-mm non-ambiguity range via homodyne interferometry, over 1000s long-term stability.
This research is supported by core funding from: Institute of Microelectronics
Grant Reference no. : NIL