Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb

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Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb
Title:
Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb
Journal Title:
Conference on Lasers and Electro-Optics
Keywords:
Publication Date:
17 August 2021
Citation:
Liu, H., Jang, Y.-S., Yang, J., Yu, M., Kwong, D.-L., & Wong, C. W. (2021). Nanometric precision metrology based on hybrid spectrally resolved and homodyne interferometry via a single soliton microcomb. Conference on Lasers and Electro-Optics. https://doi.org/10.1364/cleo_si.2021.stu2a.6
Abstract:
We present ultra-precision distance measurement based on spectral interferometer via single soliton microcomb generated in Si3N4 microresonator. We demonstrate 3-nm repeatability over a 23-mm non-ambiguity range via homodyne interferometry, over 1000s long-term stability.
License type:
Publisher Copyright
Funding Info:
This research is supported by core funding from: Institute of Microelectronics
Grant Reference no. : NIL
Description:
© 2021 Optica Publishing Group. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited
ISBN:
978-1-943580-91-0
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