Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

Integrated Optics: Devices, Materials, and Technologies XXV

10.1117/12.2581814

http://dx.doi.org/10.1117/12.2581814

Shaonan Zheng, Helen Cai, Linfang Xu, Nanxi Li, Jinjing Fu, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yuxi Cui, Fuu Ming Kai, Lennon Lee

04 March 2021

Zheng, S., Cai, H., Xu, L., Li, N., Fu, J., Gu, Z., Zhang, Y., Chen, W., Cui, Y., Kai, F. M., & Lee, L. (2021). Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides. Integrated Optics: Devices, Materials, and Technologies XXV. https://doi.org/10.1117/12.2581814

Gas sensors have wide applications including industrial process control, environment monitoring, safety control, etc. The distribution of these sensors enables data generation for the emerging trend of big data and internet of things. In this work, chip-based non-dispersive infrared (NDIR) gas sensors are demonstrated. Silicon substrate-integrated hollow waveguide (Si-iHWG), which is formed through silicon wafer etching and bonding, is used as optical channel and gas cell. A high sensitivity of 50 ppm for CO2 sensing is demonstrated. The Si-iHWG chip-based sensor with compactness, low cost, versatility, and robustness provides a promising platform for miniaturized gas sensing in various application scenarios.

Publisher Copyright

This research / project is supported by the A*STAR - IAF-PP
Grant Reference no. : A1789a0024

https://oar.a-star.edu.sg/communities-collections/articles/18790

116890C

Institute of Microelectronics