NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector

NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector

Sensors and Actuators B: Chemical

10.1016/j.snb.2021.130437

http://dx.doi.org/10.1016/j.snb.2021.130437

Doris Keh Ting Ng, Chong Pei Ho, Linfang Xu, Weiguo Chen, Yuan Hsing Fu, Tantan Zhang, Li Yan Siow, Norhanani Jaafar, Eldwin Jiaqiang Ng, Yuan Gao, Hong Cai, Qingxin Zhang, Lennon Yao Ting Lee

Materials Chemistry, Electrical and Electronic Engineering, Metals and Alloys, Surfaces, Coatings and Films, Condensed Matter Physics, Instrumentation, Electronic, Optical and Magnetic Materials

16 July 2021

Ng, D. K. T., Ho, C. P., Xu, L., Chen, W., Fu, Y. H., Zhang, T., Siow, L. Y., Jaafar, N., Ng, E. J., Gao, Y., Cai, H., Zhang, Q., & Lee, L. Y. T. (2021). NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector. Sensors and Actuators B: Chemical, 346, 130437. https://doi.org/10.1016/j.snb.2021.130437

We demonstrate NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detectors. The ScAlN-based pyroelectric detectors are fabricated using 8-inch wafer level technology with 12 % Sc-doped AlN deposited at a temperature of ∼200 °C. Together with a blackbody thermal emitter, a 10 cm long enclosed gas channel with only inlet and outlet holes connected to tubings, and testing using 2 different reference gases (N2 and synthetic air), measurements show voltage signal drop due to CO2 gas absorption at the 4.26 μm wavelength at CO2 gas concentrations ranging from 5000 ppm down to 25 ppm. The signal change due to the CO2 gas response ranges from ∼2% at 100 ppm CO2 concentration to ∼40 % at 5000 ppm CO2 gas concentration for both CO2 gas measured in N2 and in synthetic air. CO2 gas response times are also measured for CO2 gas in N2 and in synthetic air at concentrations of 5000 ppm, 1000 ppm and 400 ppm. The gas response times measured around 2 s and lower. Introduction of humidity show some minor effect (<3%) to the CO2 gas response and seems most perturbed at 10 % relative humidity. To the best of our knowledge, this is the first demonstration using ScAlN-based pyroelectric detectors in NDIR CO2 gas sensing, towards practical sensor applications. The results obtained show promise in using CMOS-compatible MEMS ScAlN-based pyroelectric detectors for NDIR gas sensing, opening up possibilities for low cost, wafer-level, monolithic NDIR gas sensors with small footprint integrated with CMOS circuits.

Attribution 4.0 International (CC BY 4.0)

This research / project is supported by the Agency for Science, Technology and Research - RIE2020 Advanced Manufacturing and Engineering (AME) IAF-PP
Grant Reference no. : A1789a0024

This research / project is supported by the Agency for Science, Technology and Research - Novel PAT Sensor
Grant Reference no. : A19B3a0008

https://oar.a-star.edu.sg/communities-collections/articles/18561

0925-4005

Institute of Microelectronics

https://doi.org/10.1016/j.snb.2021.130437