Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing

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Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing
Title:
Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing
Other Titles:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Keywords:
Publication Date:
15 March 2021
Citation:
Ng, D. K. T., Ho, C.-P., Xu, L., Zhang, T., Siow, L.-Y., Ng, E. J., Cai, H., Zhang, Q., & Lee, L. Y. T. (2021). Cmos-Mems SC0.12AL0.88N-Based Pyroelectric Infared Detector with CO2 Gas Sensing. 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). https://doi.org/10.1109/mems51782.2021.9375435
Abstract:
Pyroelectric IR detector is fabricated using ScAlN with 12% doped Sc as the pyroelectric sensing material. Dielectric layers that act as absorber are added on top of the ScAlN to help in IR absorption. This ScAlN-based pyroelectric detector is characterized by illumination from a MEMS thermal emitter with a sinusoidal input waveform. D* is measured to be as high as 1.87 x 10 7 (cm√Hz)/W at a frequency of 13 Hz. The optical absorptance of this device at 4.26 μm CO 2 gas absorption wavelength is around 0.75, measured using FTIR. CO 2 gas sensing measurement detects electrical signal changes of ~50-100 μV.
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Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - IAF-PP - Integrated Photonics Based Gas Sensors
Grant Reference no. : A1789a0024
Description:
© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
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