Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride

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Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride
Title:
Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride
Other Titles:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Keywords:
Publication Date:
15 March 2021
Citation:
Ng, D. K. T., Zhang, T., Siow, L.-Y., Xu, L., Ho, C.-P., Cai, H., Lee, L. Y. T., Zhang, Q., & Singh, N. (2021). Improved Specific Detectivity to 107 for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride. 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). https://doi.org/10.1109/mems51782.2021.9375145
Abstract:
CMOS-MEMS pyroelectric detectors based on 12%-doped ScAlN are fabricated using 8-inch MEMS wafer technology and characterized. The ScAlN pyroelectric material is deposited at a low temperature of ~200 o C. The results show D* as high as 4.3 x 10 7 (cm√Hz)/W and NEP as low as 1.26 x 10 -9 W/√Hz. This is the first demonstration of a functional CMOS-MEMS pyroelectric detector using ScAlN as the pyroelectric sensing material. Compared to AlN that usually presents D* in the range of 10 5 -10 6 , Sc-doped AlN brings on the promise of better performing CMOS-MEMS pyroelectric detectors that could be miniaturized, integrated with CMOS circuits and provide wider applications.
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Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - IAF-PP - Integrated Photonics Based Gas Sensors
Grant Reference no. : A1789a0024
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© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
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