Vachon, P., Merugu, S., Sharma, J., Lal, A., Ng, E. J., & Lee, C. (2021). Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control. 2021 IEEE International Ultrasonics Symposium (IUS). https://doi.org/10.1109/ius52206.2021.9593387
This paper presents an investigation of the acoustofluidic capabilities of highly localized flexural Lamb waves generated on a planar device via a piezoelectric layer deposited on a silicon layer of the silicon-on-nothing wafer. Silicon migration by high temperature annealing allows for the formation of a 2 μm-thin suspended membrane acting as a waveguide for flexural Lamb waves. Transportation, self-alignment and trapping of micro-scale polystyrene particles are achieved using traveling waves and standing waves inside a water droplet deposited atop of the chip.
This research / project is supported by the A*STAR - Programmatic - Nanosystems at the Edge
Grant Reference no. : A18A4b0055