Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control

Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control

2021 IEEE International Ultrasonics Symposium (IUS)

10.1109/IUS52206.2021.9593387

http://dx.doi.org/10.1109/ius52206.2021.9593387

Philippe Vachon, Srinivas Merugu, Jaibir Sharma, Amit Lal, Eldwin J. Ng, Chengkuo Lee

12 November 2021

Vachon, P., Merugu, S., Sharma, J., Lal, A., Ng, E. J., & Lee, C. (2021). Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control. 2021 IEEE International Ultrasonics Symposium (IUS). https://doi.org/10.1109/ius52206.2021.9593387

This paper presents an investigation of the acoustofluidic capabilities of highly localized flexural Lamb waves generated on a planar device via a piezoelectric layer deposited on a silicon layer of the silicon-on-nothing wafer. Silicon migration by high temperature annealing allows for the formation of a 2 μm-thin suspended membrane acting as a waveguide for flexural Lamb waves. Transportation, self-alignment and trapping of micro-scale polystyrene particles are achieved using traveling waves and standing waves inside a water droplet deposited atop of the chip.

Publisher Copyright

This research / project is supported by the A*STAR - Programmatic - Nanosystems at the Edge
Grant Reference no. : A18A4b0055

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https://oar.a-star.edu.sg/communities-collections/articles/18463

978-1-6654-0355-9

Institute of Microelectronics