Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control

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Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control
Title:
Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control
Other Titles:
2021 IEEE International Ultrasonics Symposium (IUS)
Keywords:
Publication Date:
12 November 2021
Citation:
Vachon, P., Merugu, S., Sharma, J., Lal, A., Ng, E. J., & Lee, C. (2021). Investigation of Localized Flexural Lamb Wave for Acoustofluidic Actuation and Particle Control. 2021 IEEE International Ultrasonics Symposium (IUS). https://doi.org/10.1109/ius52206.2021.9593387
Abstract:
This paper presents an investigation of the acoustofluidic capabilities of highly localized flexural Lamb waves generated on a planar device via a piezoelectric layer deposited on a silicon layer of the silicon-on-nothing wafer. Silicon migration by high temperature annealing allows for the formation of a 2 μm-thin suspended membrane acting as a waveguide for flexural Lamb waves. Transportation, self-alignment and trapping of micro-scale polystyrene particles are achieved using traveling waves and standing waves inside a water droplet deposited atop of the chip.
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Publisher Copyright
Funding Info:
This research / project is supported by the A*STAR - Programmatic - Nanosystems at the Edge
Grant Reference no. : A18A4b0055
Description:
© 2021 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISBN:
978-1-6654-0355-9
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