Wafer-Level Characterization of Silicon Nitride CWDM (De)Multiplexers Using Bayesian Inference

Wafer-Level Characterization of Silicon Nitride CWDM (De)Multiplexers Using Bayesian Inference

IEEE Photonics Technology Letters

10.1109/LPT.2020.3004850

https://doi.org/10.1109/lpt.2020.3004850

Jun Rong Ong, Tina X. Guo, Thomas Y. L. Ang, Soon Thor Lim, Hong Wang, Ching Eng Png

Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials

25 June 2020

Ong, J. R., Guo, T. X., Ang, T. Y. L., Lim, S. T., Wang, H., & Png, C. E. (2020). Wafer-Level Characterization of Silicon Nitride CWDM (De)Multiplexers Using Bayesian Inference. IEEE Photonics Technology Letters, 32(15), 917–920. doi:10.1109/lpt.2020.3004850

A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data, we apply Bayesian inference methods to estimate the waveguide geometery parameters and also quantify the uncertainty of the estimates.

Publisher Copyright

This research / project is supported by the A*STAR-NTU-SUTD AI Partnership - A*STAR-NTU-SUTD AI Partnership Grant
Grant Reference no. : RGANS1901

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