Quantum imaging for the semiconductor industry

Quantum imaging for the semiconductor industry
Quantum imaging for the semiconductor industry
Other Titles:
Applied Physics Letters
Publication Date:
06 August 2020
Appl. Phys. Lett. 117, 054004 (2020); https://doi.org/10.1063/5.0015614
Infrared (IR) imaging is one of the significant tools for the quality control measurements of fabricated samples. Standard IR imaging techniques use direct measurements, where light sources and detectors operate in the IR range. Due to the limited choices of IR light sources or detectors, challenges in reaching specific IR wavelengths may arise. In our work, we perform indirect IR microscopy based on the quantum imaging technique. This method allows us to probe the sample with IR light, while the detection is shifted into the visible or near-IR range. Thus, we demonstrate IR quantum imaging of the silicon chips at different magnifications, wherein a sample is probed at a 1550 nm wavelength, but the detection is performed at 810 nm. We also analyze the possible measurement conditions of the technique and estimate the time needed to perform quality control checks of samples.
License type:
Publisher Copyright
Funding Info:
This research / project is supported by the Agency for Science, Technology and Research - Quantum technology for the engineering (QTE) Program
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