ScAlN-based LCAT Mode Resonators Above 2 GHz with High FOM and Reduced Fabrication Complexity

Page view(s)
11
Checked on Sep 29, 2022
ScAlN-based LCAT Mode Resonators Above 2 GHz with High FOM and Reduced Fabrication Complexity
Title:
ScAlN-based LCAT Mode Resonators Above 2 GHz with High FOM and Reduced Fabrication Complexity
Other Titles:
IEEE Electron Device Letters
Keywords:
Publication Date:
01 October 2017
Citation:
Y. Zhu, N. Wang, G. Chua, C. Sun, N. Singh and Y. Gu, "ScAlN-Based LCAT Mode Resonators Above 2 GHz With High FOM and Reduced Fabrication Complexity," in IEEE Electron Device Letters, vol. 38, no. 10, pp. 1481-1484, Oct. 2017. doi: 10.1109/LED.2017.2747089
Abstract:
This letter reports the first implementation of a newclass of laterally coupled alternating thickness (LCAT) mode resonators operating above 2 GHz, realised by replacing the bottom interdigitated electrodes of the conventional LCAT mode resonator with an electrically floating plate. Besides saving one mask process and relaxing the tight resolution and alignment requirements for defining small features, the flat unpatterned bottom electrode metal is also more favorable for the growth of highly oriented piezoelectric thin film, which results in an improved resonator quality factor (Q). A group of 8% scandium doped aluminium nitride-based modified LCAT mode resonators with frequency difference over 100 MHz by varying the top interdigitated electrode pitches are fabricated achieving coupling coefficient (k2eff) of up to 6.45% and figure of merit of up to 54, making them promising candidates for integrated band selection filter banks.
License type:
PublisherCopyrights
Funding Info:
Description:
© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISSN:
0741-3106
1558-0563
Files uploaded:
Files uploaded:
File Size Format Action
There are no attached files.