Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators with k2t Exceeding 4.9%

Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators with k2t Exceeding 4.9%

IEEE Microwave and Wireless Components Letters

10.1109/LMWC.2016.2646924

https://doi.org/10.1109/LMWC.2016.2646924

Cristain Cassella, Nicolo Oliva, Jeffrey Soon, Merugu Srinivas, Navab Singh, Gianluca Piazza

01 February 2017

C. Cassella, N. Oliva, J. Soon, M. Srinivas, N. Singh and G. Piazza, "Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators With $k_{t}^{2}$ Exceeding 4.9%," in IEEE Microwave and Wireless Components Letters, vol. 27, no. 2, pp. 105-107, Feb. 2017. doi: 10.1109/LMWC.2016.2646924

In this work we demonstrate high values of electromechanical coupling coefficient (k2t) exceeding 4.9% in 1-μm thick Aluminum Nitride (AlN) two-dimensional-mode resonators (2DMRs) operating around 3.2 GHz. Such a high k2t-value, which is attained thanks to the transduction of the resonators through both the d33 and d31 piezoelectric coefficients of AlN, enables low-power oscillators and low insertion-loss filters, operating in the Super-High-Frequency (SHF) range.

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Institute of Microelectronics