Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators with k2t Exceeding 4.9%

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Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators with k2t Exceeding 4.9%
Title:
Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators with k2t Exceeding 4.9%
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IEEE Microwave and Wireless Components Letters
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Publication Date:
01 February 2017
Citation:
C. Cassella, N. Oliva, J. Soon, M. Srinivas, N. Singh and G. Piazza, "Super High Frequency Aluminum Nitride Two-Dimensional-Mode Resonators With $k_{t}^{2}$ Exceeding 4.9%," in IEEE Microwave and Wireless Components Letters, vol. 27, no. 2, pp. 105-107, Feb. 2017. doi: 10.1109/LMWC.2016.2646924
Abstract:
In this work we demonstrate high values of electromechanical coupling coefficient (k2t) exceeding 4.9% in 1-μm thick Aluminum Nitride (AlN) two-dimensional-mode resonators (2DMRs) operating around 3.2 GHz. Such a high k2t-value, which is attained thanks to the transduction of the resonators through both the d33 and d31 piezoelectric coefficients of AlN, enables low-power oscillators and low insertion-loss filters, operating in the Super-High-Frequency (SHF) range.
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© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
ISSN:
1531-1309
1558-1764
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