Thin-film Magnetic Inductors for Integrated Power Management

Thin-film Magnetic Inductors for Integrated Power Management
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Thin-film Magnetic Inductors for Integrated Power Management
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2017 IEEE 67th Electronic Components and Technology Conference (ECTC)
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30 May 2017
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Abstract:
This paper presents the design considerations for thin-film magnetic power inductors for integrated voltage regulator (IVR). Optimum design parameters for solenoid inductors are arrived at that maximize key performance metrics such as quality factor, inductor efficiency, inductance density, and operation frequency. A fabrication approach to integrate the solenoid inductor with thin-film magnetic material within the redistribution (RDL) layers is presented. Non-idealities that could impact the inductance performance are illustrated. Finally, electrical characterization of a set of test inductors is carried out and the results are presented.
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(c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
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