A High Coupling Coefficient 2.3-GHz AlN Resonator for High Band LTE Filtering Application

Page view(s)
5
Checked on Sep 13, 2022
A High Coupling Coefficient 2.3-GHz AlN Resonator for High Band LTE Filtering Application
Title:
A High Coupling Coefficient 2.3-GHz AlN Resonator for High Band LTE Filtering Application
Other Titles:
IEEE Electron Device Letters
Keywords:
Publication Date:
01 October 2016
Citation:
Y. Zhu, N. Wang, C. Sun, S. Merugu, N. Singh and Y. Gu, "A High Coupling Coefficient 2.3-GHz AlN Resonator for High Band LTE Filtering Application," in IEEE Electron Device Letters, vol. 37, no. 10, pp. 1344-1346, Oct. 2016. doi: 10.1109/LED.2016.2602852
Abstract:
This letter reports an aluminium nitride (AlN)-based micromechanical resonator with high-effective coupling coefficient (k2eff) and low insertion loss (IL), which are comparable with those of Film Bulk Acoustic Resonators (FBARs). The in-house-fabricated resonator comprises of lithographically patterned top and bottom molybdenum interdigitated electrode fingers and a layer of 1-μm-thick AlN sandwiched in between. Synergetic inter-mode coupling between the constituent thickness mode and the lateral mode can be realized within a wide frequency range, which can be treated as a subcategory of degenerated cross-sectional Lamé mode, enabling the capability of lithographic tuning of resonant frequency yet not compromising k2eff. Measurement results show that the designed 2.3-GHz resonator achieves a k2 eff of 6.34% and an IL of 0.26 dB upon direct connection to a network with 50-Ω termination, making it a promising candidate for Wireless Local Area Network (WLAN) and high band Long Term Evolution (LTE) band selection filtering applications.
License type:
PublisherCopyrights
Funding Info:
Description:
(c) 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
ISSN:
0741-3106
1558-0563
Files uploaded:

Files uploaded: