AlN-on-SOI platform-based micro-machined hydrophone

Page view(s)
7
Checked on Sep 13, 2022
AlN-on-SOI platform-based micro-machined hydrophone
Title:
AlN-on-SOI platform-based micro-machined hydrophone
Other Titles:
Applied Physics Letters
Keywords:
Publication Date:
19 July 2016
Citation:
Appl. Phys. Lett. 109, 032902 (2016)
Abstract:
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic hydrophone. We have conducted a systematic design study for the hydrophone sensor to meet the stringent requirements of underwater applications. The hydrophone sensor was fabricated on a cavity siliconon-insulator (SOI) substrate using an in-house CMOS-compatible AlN-on-SOI process platform. A 5 x 5 arrayed hydrophone sensor was characterized thoroughly using an industry-standard hydrophone calibration instrument. The results show that the hydrophone achieved a sound sensitivity of -182.5 dB 6 0.3 dB (ref. to 1Vrms/lPa) and an eligible acceleration sensitivity of only 196.5 dB (ref. to 1Vrms/lg), respectively, a non-linearity of 0.11%, a noise resolution of 57.5 dB referenced to 1 lPa/ Hz within an ultra-low operation bandwidth of 10Hz~100Hz, the highest noise resolution of micro-machined hydrophones reported to date, and better than traditional bulky hydrophones in terms of the same application. The size of the 5x5 arrayed hydrophone sensor is about 2mm x 2mm.
License type:
PublisherCopyrights
Funding Info:
Description:
ISSN:
0003-6951
1077-3118
Files uploaded:

Files uploaded:

File Size Format Action
pub16-005-sam-002-pp.pdf 1.52 MB PDF Open