CMOS-compatible silicon-nanowire-based Coulter counter for cell enumeration

Page view(s)
14
Checked on Aug 14, 2024
CMOS-compatible silicon-nanowire-based Coulter counter for cell enumeration
Title:
CMOS-compatible silicon-nanowire-based Coulter counter for cell enumeration
Journal Title:
Biomedical Engineering, IEEE Transactions on
Keywords:
Publication Date:
16 July 2015
Citation:
Chen, Y.; Guo, J.; Muhammad, H.; Kang, Y.; Ary, S., "CMOS-compatible silicon-nanowire-based Coulter counter for cell enumeration," in Biomedical Engineering, IEEE Transactions on , vol.PP, no.99, pp.1-1
Abstract:
A silicon-nanowire-based Coulter counter has been designed and fabricated for particle/cell enumeration. The silicon nanowire was fabricated in a fully complementary metal–oxide–semiconductor (CMOS)-compatible process and used as a field effect transistor (FET) device. The Coulter counter device worked on the principle of potential change detection introduced by the passing of micro-particles/cells through a sensing channel. Device uniformity was confirmed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Current–voltage measurement showed the high sensitivity of the nanowire FET device to the surface potential change. The results revealed that the silicon-nanowire-based Coulter counter can differentiate polystyrene beads with diameters of 8 and 15 μm. Michigan Cancer Foundation-7 (MCF-7) cells have been successfully counted to validate the device. A fully CMOS-compatible fabrication process can help the device integration and facilitate the development of sensor arrays for high throughput application. With appropriate sample preparation steps, it is also possible to expand the work to applications such as rare-cells detection.
License type:
PublisherCopyrights
Funding Info:
Description:
(c) 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
ISSN:
0018-9294
Files uploaded:

File Size Format Action
pub15-193-bep-011-pp.pdf 644.86 KB PDF Open