Centimeter-scale 3D fishnet metamaterial with negative refractive index in the near infrared spectral
range is demonstrated. The large-area fabrication is realized using a conventional laser interference
lithography technique in combination with a tri-layer lift-off procedure. This method allows us to
effectively achieve a centimeter-scale 3D fishnet structure with a pitch of 600 nm and five functional
Ag/SiO2 bi-layers with a total thickness of 300 nm. The experimental transmission spectrum
correlates well with simulation results. Effective refractive index versus frequency associated with
permittivity and permeability are retrieved. Two negative refractive index regions are found in the
near-infrared spectral range
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Copyright (2013) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Appl. Phys. Lett. 103, 123116 (2013) and may be found at http://dx.doi.org/10.1063/1.4821508.