The high programming current density of phase change memory (PCM) is an obstacle for its
scaling and high density chip development. In this paper, an elevated-confined PCM (e-PCM)
with self-aligned oxidation heater was proposed to reduce the programming current density by
increasing the Joule heat and reducing heat loss simultaneously. 200 nm diameter size e-PCM with
self-aligned TiWOx heater was fabricated and tested. The RESET current is 350 lA with 100 ns
pulse and the corresponding programming current density is 1.12 MA/cm2. The low current density
indicates this structure as a promising candidate for high density PCM chip applications.
Copyright (2014) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Appl. Phys. Lett. 105, 213509 (2014) and may be found at http://dx.doi.org/10.1063/1.4902872.