Chong Pei Ho ; Prakash Pitchappa ; Piotr Kropelnicki ; Jian Wang ; Hong Cai, et al. "Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications", J. Nanophoton. 8(1), 084096 (Jul 15, 2014). ; http://dx.doi.org/10.1117/1.JNP.8.084096
Abstract:
We present the design and the characterization of a polycrystalline silicon (Si)-based
photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order
to facilitate transmission measurement, the PhC membrane is released by removing the underneath
Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured
at room temperature. Characterization is also done at 450°C and it reveals that the peak
reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a
linear wavelength shift of 0.174 nm∕°C and the thermo-optic coefficient is calculated to be
þ1.70 × 10−4 K−1. By altering the dimension of the PhC air holes, it is also shown that
such a thermo-optic effect is compensated.