Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications

Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications
Title:
Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications
Other Titles:
Journal of Nanophotonics
Keywords:
Publication Date:
01 January 2014
Citation:
Chong Pei Ho ; Prakash Pitchappa ; Piotr Kropelnicki ; Jian Wang ; Hong Cai, et al. "Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications", J. Nanophoton. 8(1), 084096 (Jul 15, 2014). ; http://dx.doi.org/10.1117/1.JNP.8.084096
Abstract:
We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-μm wavelength are measured at room temperature. Characterization is also done at 450°C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174 nm∕°C and the thermo-optic coefficient is calculated to be þ1.70 × 10−4 K−1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated.
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PublisherCopyrights
Funding Info:
Description:
ISSN:
1934-2608
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